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Characteristics of Anti-reflective Coating Film Prepared from Hybrid Solution of TEOS/Base and MTMS/Acid
Hyun-Kyu Park, Hyo-Sub Kim, Chu-Sik Park, Young-Ho Kim
Applied Chemistry for Engineering :: Vol.30 No.3 pp.358-364
DOI:https://doi.org/10.14478/ace.2019.1031