The photocatalyst TiO2 thin film was made from titanium (IV) isopropoxide, ethanol, and HCI by sol-gel method. The surface observation by SEM showed the sample that was coated 5 times at 500 ℃ had good properties. The component ratio, in atom% of O : Ti by EDX analysis, of 61 : 39 by spin coating was superior than dip coating. It was found that crystal structure changed from anatase phase to rutile phase as a function of the temperature of thin film fabrication, and this was measured by XRD. The photolysis efficiency of total organic compounds (TOC) by lighting UV beam on TiO2 thin film showed 20%~65% within 1 h, and decreased slowly thereafter.

광촉매 TiO2박막은 titanium (IV) isopropoxide, 에탄올, HCI을 일정한 비율로 졸-겔방법에 의해 제작하였다. SEM에 의한 표면관찰에서는 500 ℃에서 5회 반복해서 코팅하여 제작한 것이 우수했다. EDX에 의한 성분비는 spin코팅이 O : Ti의 atom%가 61 : 39로 dip코팅보다 우수했다. 그리고 박막제작의 온도에 따라서 anatase상에서 rutile상으로 결정구조가 변화되어 가는 것을 XRD측정으로 알았다. 제작한 TiO2박막에 UV빔을 조사해서 얻은 TOC의 광분해효율이 1 h 이내에 20~65%를 나타내었고, 그 이후에는 서서히 감소하는 것을 확인했다.