In this study, an analysis was made on the characteristics of titania powders synthesized by RF plasma process and the annealing process. In the plasma process, titania powders were synthesized by aggregation of initially formed nano-particles. The titania powders appeared to be amorphous, and the purity of the amorphous titania powder improved considerably compared to the powder from existing processes. The amount of organic materials contained in the powder was approximately 0.5 ~3% in weight. The ratio of the anatase phase in the powder was increased in accordance with the increase of RF-power over 400 watt under the constant annealing temperature of 700℃. The crystallite size ranged about 20 to 68 nm and it increased when the annealing temperature increased.

본 연구에서는 RF 플라즈마 공정과 열처리 공정에 의해 합성된 티타니아 분말의 특성을 분석하였다. 플라즈마에 의해 합성된 분말은 나노 입자를 형성한 후 서로 뭉치면서 만들어졌다. 1차 분말의 유기물질 함유량이 0.5~3%이었다. 열처리 온도 700℃에서 RF-출력이 400 watt 이상으로 증가할수록 아나타제의 비율이 증가하였다. 열처리 온도가 증가할수록 결정의 크기는 증가하였으며, 분말의 결정 크기는 약 20~60 nm이었다.