Polyphenylsilsesquioxane-b-polycaprolactone (PPSQ-b-PCL) copolymer, to apply as an interlayer dielectric material, was synthesized from condensation polymerization of α, ω-hydroxyl polycaprolactone (PCL) prepolymer and polyphenylsilsesquioxan (PPSQ). PPSQ was prepared from condensation polymerization of phenyltrichlorosilane and phenylenediamine. PPSQ-b-PCL copolymer was spin-coated on ITO glass and cured in an electric fumace that was equipped with N_2 injection port. By curing of the coated material, sphere-shaped pores was obtained by sintering the PCL segment. The structures of PPSQ-b-PCL, were confirmed by FT-IR and NMR. Their thermal properties were measured by TGA. Morphology, topography, and dielectric constant, according to the contents of PCL in film, were measured by SEM, AFM, and impedance analyzer.

Phenyltrichlorosilane과 phenylenediamine을 preamination, 가수분해, 축합반응시켜 융해성이 우수한 ladder형 polyphenylsilsesquioxane (PPSQ)을 제조하였다. PPSQ에 분자량이 조절된 α, ω-hydroxyl polycaprolactone (PCL) prepolymer를 공중합시켜 분자구조가 제어된 polysilsesquioxane-b-polycaprolactone (PPSQ-b-PCL) 공중합체를 제조하였다. PPSQ-b-PCL 공중합체를 ITO glass 위에 코오팅하여 박막을 제조하고 고온에서 PCL segment를 소결시켜 기공의 분산성이 우수한 PPSQ의 박막을 제조하여 그 특성을 측정하였다. 이들의 구조 및 열적 특성은 FT-IR, NMR 및 TGA로 확인하였으며 이들 박막의 모폴로지 및 기공의 분산성은 SEM과 AFM으로 측정하였다. 또한 전기적 특성은 MIM (Metal. Insulator/Metal)방식으로 유전율을 측정하였다.